| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of simplifying the structure of a sensor system, and miniaturizing the system, concerning the structure of the pressure sensor. SOLUTION: This pressure detection element constituted of a frame body and a piezoelectric substrate integrated with the frame body is described as follows: a pair of comb-shaped electrodes sandwiching the frame inside of the frame body of the piezoelectric substrate are formed; a surface wave propagating along the surface of the piezoelectric substrate is generated by using one comb-shaped electrode of the comb-shaped electrodes as the input side and the other comb-shaped electrode as the output side; the piezoelectric substrate is deformed by a pressure change applied to the frame body inside; and thereby a pressure change amount is detected by a frequency propagation intensity change between the input and the output of the pair of the comb-shaped electrodes on the piezoelectric substrate, to thereby detect inexpensively and accurately with a simple structure. COPYRIGHT: (C)2007,JPO&INPIT
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