METHOD AND APPARATUS FOR CONTROLLING SAMPLE POSITION DURING MATERIAL REMOVAL OR ADDITION
摘要
<p>A method and system includes the accurate positioning of a sample in a multi-axis range of motion. In a preferred embodiment, the present invention enables this movement by combining coarse and fine motion stages. By using a combination of stages and precise measuring means, normal and typical errors are significantly reduced.</p>
申请公布号
WO2007092498(A2)
申请公布日期
2007.08.16
申请号
WO2007US03255
申请日期
2007.02.06
申请人
RAVE LLC;BOYETTE, JAMES, E.;LECLAIRE, JEFFREY, E.;WHITE, ROY
发明人
BOYETTE, JAMES, E.;LECLAIRE, JEFFREY, E.;WHITE, ROY