| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a flexible type of element substrate for liquid crystal display device capable of patterning and forming a columnar spacer which has sufficient adhesiveness for a part corresponding to a black matrix according to photolithography without generating any malfunction. SOLUTION: An alignment layer 34 is formed on the uppermost surface side, a plastic film 10 on which a color filter 30 including a black matrix 30BM is formed on the lower side of the alignment layer 34 is prepared, a positive type of photosensitive resin layer 36 is formed on the alignment layer 34, thereafter, the photosensitive resin layer 36 is exposed from the surface side via a photomask such that a pattern superimposed on the black matrix 30 BM is obtained and, at the same time, the photosensitive resin layer 36 is exposed from the back surface side by using a black matrix 30BM as a mask. Thereafter, by developing the photosensitive resin layer 36, a plurality of columnar spacers S which are self-alignedly arranged on the part of the alignment layer 34 corresponding to the black matrix 30BM are obtained. COPYRIGHT: (C)2007,JPO&INPIT
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