| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate transfer device in which a substrate can be held in an almost horizontal state even when a large substrate is transferred. SOLUTION: A pick 202 is fixed to a pick base 201 by using a pulling screw 210 for pulling in a vertical direction at its base end part and a pushing screw 211 for pushing the pick 202 in the vertical direction. The pick extends in a diagonally upward direction from its base end part side toward its tip part side with a specified angle to a horizontal axis. The height position of the tip part is positioned upper than the base end part (a supporting end by the pick base 201). COPYRIGHT: (C)2007,JPO&INPIT
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