VAPOR PHASE GROWTH APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a vapor phase growth apparatus capable of reliably removing deposit containing yellow phosphor from a film forming member for reliably changing to a safe substance that does not catch fire even if it is exposed to the atmosphere. SOLUTION: The vapor phase growth apparatus comprises an oxygen concentration meter 15 for storing a reactor 12 in a glove box 11, and measuring the concentration of oxygen in the glove box; an oxygen introduction path 16 for introducing gas containing oxygen into the glove box; a flow regulator 16V for regulating the flow rate of gas containing oxygen introduced from the oxygen introduction path; an inert gas introduction path 17 for introducing inert gas into the glove box; and an exhaust path 18 for exhausting gas from the inside of the glove box. COPYRIGHT: (C)2007,JPO&INPIT