发明名称 Optics system for an interferometer
摘要 An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the reference beams impinge, wherein at least one of the mirrors can be displaced along a measuring axis. The optical assembly further includes a beam deflector, as well as a retro-reflector, wherein the measuring and the reference beams reflected at the measuring and the reference mirrors via the beam deflector and the retro-reflector are guided at least a second time in the direction toward the measuring and the reference mirrors and wherein the beam deflector is embodied as a plane-parallel plate.
申请公布号 US2007188767(A1) 申请公布日期 2007.08.16
申请号 US20050244478 申请日期 2005.10.06
申请人 SPANNER ERWIN;HUBER-LENK HERBERT 发明人 SPANNER ERWIN;HUBER-LENK HERBERT
分类号 G01B11/02 主分类号 G01B11/02
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