发明名称 |
SHORT PULSE ATMOSPHERIC PRESSURE GLOW DISCHARGE METHOD AND APPARATUS |
摘要 |
<p>Method and plasma generating apparatus for generating an atmospheric pressure glow discharge plasma in a treatment space (5) filled with a gas composition. Two electrodes (2, 3) are connected to a power supply (4) for providing electrical power during an on- time (t<SUB>on</SUB>). The power supply (4) is arranged to provide a periodic signal with an on-time (t<SUB>on</SUB>) which is shorter than a predetermined time period, the predetermined time period corresponding substantially to the time necessary for a dust coagulation center from the gas composition to become a cluster in the treatment space (5). This method and apparatus may be used for depositing a layer of material on a substrate (6) in the treatment space (5).</p> |
申请公布号 |
WO2007091891(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
WO2007NL50052 |
申请日期 |
2007.02.09 |
申请人 |
FUJIFILM MANUFACTURING EUROPE B.V.;DE VRIES, HINDRIK, WILLEM |
发明人 |
DE VRIES, HINDRIK, WILLEM |
分类号 |
H01J37/32 |
主分类号 |
H01J37/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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