Field-emission electron source apparatus

摘要

An electron beam emitted from a field-emission electron source array passes through a plurality of through holes formed in a trimming electrode and reaches a target. Each of the plurality of through holes in the trimming electrode has an opening on a side of the field-emission electron source array and an electron beam passageway that continues from the opening. The length of the electron beam passageway is larger than the diameter of the opening. Part of the electron beam that has entered the through holes is absorbed and removed by a lateral wall of the electron beam passageway. In this way, it is possible to provide a high-definition field-emission electron source apparatus in which divergence of an electron beam emitted from a field-emission electron source array is suppressed.