SEMICONDUCTOR DEVICE INSPECTING APPARATUS

摘要

A semiconductor device inspecting apparatus is provided to reduce an occupational area of equipment and to maximize the efficiency of inspection by using an improved inspecting mechanism capable of integrating an outside inspection and an inside inspection. A semiconductor device inspecting apparatus includes a loader for loading an inspection object semiconductor device, an outside image detecting unit(121) for obtaining an outer image from the semiconductor device, a transmitting image detecting unit(131) for obtaining a transmitting image by irradiating an X-ray on the semiconductor device, a control unit, a sorter, an unloader and a transfer unit. The control unit(141) is used for determining a present state of the semiconductor device by comparing the inspection information of the outside image detecting unit and the image information of the transmitting image detecting unit with a setting reference. The sorter is classifying semiconductor device into good and bad products according to the determination results of the control unit. The unloader(161) is used for unloading the semiconductor device. The transfer unit(151) transfers the semiconductor device.