发明名称 CUTTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cutting device which, when a cutting blade breaks during cutting work, automatically replaces the broken cutting blade with a new cutting blade. SOLUTION: The cutting device includes a chuck table which holds a workpiece, a cutting means which has a cutting blade fitted removably thereto, the cutting blade cutting the workpiece held on the chuck table, and a cutting blade replacing mechanism which replaces the cutting blade of the cutting means with a new one. The cutting device also includes a breakage detecting means which detects a state of breakage of the cutting blade, and a control means which controls the cutting means and the cutting blade replacing mechanism on the basis of a detection signal from the breakage detecting means. When the breakage detecting means detects the state of breakage of the cutting blade, the control means stops the operation of the cutting means and controls the operation of the cutting blade replacing mechanism. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007208114(A) 申请公布日期 2007.08.16
申请号 JP20060026984 申请日期 2006.02.03
申请人 DISCO ABRASIVE SYST LTD 发明人 SEKIYA KAZUMA
分类号 H01L21/301;B23Q17/09 主分类号 H01L21/301
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