| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe device that does not require calibration labor by an operator whenever a scan stage or a driving stage of a probe is replaced, and can suitably offset the inertia force occurring in these stages. SOLUTION: The scanning probe device comprises the probe and the scan stage. The scan stage comprises a driving element 500 for moving a sample holding base 505 for holding a sample, and movable sections 510 and 515 moving in the direction for offsetting the inertia force occurring in moving the sample holding base. The probe and the sample are moved relatively, and information on the sample is acquired, information is recorded on the sample, or the sample is processed. In other words, the scan stage has a memory 5 storing characteristic information on the scan stage, and the driving element including the sample holding base and the movable sections can be attached, detached, or replaced in the scanning probe device body 1. COPYRIGHT: (C)2007,JPO&INPIT |
