| 摘要 |
PROBLEM TO BE SOLVED: To observe surface condition while precisely measuring the surface roughness of the observation object difficult to measure with a probe of contact type. SOLUTION: The measuring endoscope 1 comprises: the probe 2; the light source unit 3 provided with a low coherent light source 7; and a single optical fiber 4 for connecting the probe 2 and the light source unit 3, wherein the light source unit 3 comprises: the first low coherent light branching part 13 for branching the low coherent light L<SB>0</SB>into the reference light L<SB>2</SB>and the measuring light L<SB>3</SB>; the light path length adjusting part 20 for adjusting the light length of the reference light length L<SB>2</SB>; and the optical multiplexer part 15 for multiplexing the reference light L<SB>2</SB>, the light path of which is adjusted and the measuring light are incident on the optical fiber 4. The probe 2 comprises: the second low coherent light branching part for branching the referent light L<SB>2</SB>; the low coherent light multiplexer part for multiplexing the measuring light L<SB>3</SB>returned from the observation object A and the reference light L<SB>2</SB>; and an imaging element for imaging the multiplexed reference light L<SB>2</SB>and the measuring light L<SB>3</SB>. COPYRIGHT: (C)2007,JPO&INPIT
|
