| 摘要 |
PROBLEM TO BE SOLVED: To improve accuracy and sensibility by forming a circular wire section at the tip of each projection arm in a silicon frame type substrate, configuring its both edges as free edges and preventing any thermal stress from occurring therein. SOLUTION: A detecting section structure of a gas rate sensor is provided, wherein circular wire sections (6, 7) are formed at the tip of each projection arm (2, 3, 4 and 5) made up in the inner surface of the silicon frame type substrate (1, 1B) so as to project, and the both edges (6a, 6b, 7a and 7b) of the wire sections (6, 7) are configured as the free edges, thereby preventing the thermal stress from occurring therein. COPYRIGHT: (C)2007,JPO&INPIT
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