发明名称 MOUNTING MACHINE OF SEMICONDUCTOR CHIP
摘要 PROBLEM TO BE SOLVED: To provide a mounting machine in which the adhesion of dust can be prevented when a semiconductor chip is mounted to a substrate. SOLUTION: The machine for mounting a semiconductor chip on a substrate comprises a machine body 1, a guide rail 2 performing the conveyance positioning of the substrate along the width direction of the machine body, a wafer table 4 disposed on the front side of the guide rail in the front and back direction of the machine body and supplied with a wafer ring 8 having a semiconductor wafer 11 divided into a large number of semiconductor chips 12, a tool 35 for mounting the semiconductor chip taken out of the wafer table on the substrate, and a nozzle body 40 for blowing clean air when the semiconductor chip is taken out of the wafer table in order to remove dust adhering to the semiconductor chip. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007207854(A) 申请公布日期 2007.08.16
申请号 JP20060022653 申请日期 2006.01.31
申请人 SHIBAURA MECHATRONICS CORP 发明人 KAWAI ISAMU
分类号 H01L21/50;H01L21/60 主分类号 H01L21/50
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