The invention concerns a device for producing gaseous plasma by ionizing with a microwave source of specific nominal power (P<SUB>n</SUB>), comprising a magnetron (7), receiving its electric power from a supply circuit. Said device is characterized in that the power (P<SUB>d</SUB>) delivered by the supply circuit to the magnetron (7) is not higher than one fourth of the nominal power (P<SUB>n</SUB>) of the magnetron (7).
申请公布号
WO2006070107(A8)
申请公布日期
2007.08.16
申请号
WO2005FR03223
申请日期
2005.12.21
申请人
SOCIETE POUR LA CONCEPTION DES APPLICATIONS DES TECHNIQUES ELECTRONIQUES - SATELEC;REGERE, PASCAL;RICARD, ANDRE;COUSTY, SARAH
