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发明名称
ETCHING METHOD OF ORGANIC INSULATING FILM
摘要
申请公布号
KR100749839(B1)
申请公布日期
2007.08.16
申请号
KR20020012838
申请日期
2002.03.11
申请人
发明人
分类号
H01L21/302;H01L21/3065;H01J37/32;H01L21/311
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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