发明名称 PROBE CARD AND PROBE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a probe card and a probe device, which can be manufactured easily compared to conventional ones and reduce production costs. SOLUTION: The probe card 1 has an external form shaped in a circle and has a plurality of connectors 2 for electrically connecting to a tester along the peripheral portion at the upper side of the card. A number of probes 3 are provided on a substrate 4 arranged in the lower side of the card 1. The substrate 4 and the connectors 2 are connected by a flexible printed wiring board 5 having flexibility. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007205960(A) 申请公布日期 2007.08.16
申请号 JP20060026614 申请日期 2006.02.03
申请人 TOKYO ELECTRON LTD 发明人 KOMATSU SHIGEKAZU;AMAMIYA TAKASHI;MOCHIZUKI JUN
分类号 G01R1/073;G01R31/26;H01L21/66 主分类号 G01R1/073
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