发明名称 |
PROBE CARD AND PROBE DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a probe card and a probe device, which can be manufactured easily compared to conventional ones and reduce production costs. SOLUTION: The probe card 1 has an external form shaped in a circle and has a plurality of connectors 2 for electrically connecting to a tester along the peripheral portion at the upper side of the card. A number of probes 3 are provided on a substrate 4 arranged in the lower side of the card 1. The substrate 4 and the connectors 2 are connected by a flexible printed wiring board 5 having flexibility. COPYRIGHT: (C)2007,JPO&INPIT
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申请公布号 |
JP2007205960(A) |
申请公布日期 |
2007.08.16 |
申请号 |
JP20060026614 |
申请日期 |
2006.02.03 |
申请人 |
TOKYO ELECTRON LTD |
发明人 |
KOMATSU SHIGEKAZU;AMAMIYA TAKASHI;MOCHIZUKI JUN |
分类号 |
G01R1/073;G01R31/26;H01L21/66 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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