| 摘要 |
A device assembly ( 16 ) for a precision apparatus ( 10 ) includes a device housing ( 30 ), a device ( 32 ), a device mover assembly ( 34 ), and a measurement system ( 36 ). The device mover assembly ( 34 ) moves the device ( 32 ) relative to the device housing ( 30 ) about a first axis and about a second axis that is orthogonal to the first axis. The measurement system ( 36 ) monitors movement of the device ( 32 ). The measurement system ( 36 ) monitors movement of the device ( 32 ) and can include a first sensor assembly ( 260 ) that monitors movement about the first axis and a second sensor assembly ( 262 ) that monitors movement about a second axis. Each sensor assembly ( 260 ) ( 262 ) can include a sensor adjuster ( 474 ) ( 476 ) that adjusts the position of a portion of the respective sensor assembly ( 260 ) ( 262 ) to independently tune the sensor assemblies ( 260 ) ( 262 ) and independently enhance the performance of each sensor assembly ( 260 ) ( 262 ). Further, each sensor assembly ( 260 ) ( 262 ) can be a magnetic type sensor.
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