| 摘要 |
A correction method for correcting measurement error in data obtained when a stylus tip of a measurement apparatus that moves following the height of a workpiece traces the workpiece along a measurement axis, the measurement error having occurred due to stylus movement in a plane defined by the measurement axis and height directions, the method comprising the step of: a calibration measurement process of obtaining calibration measurement data that includes shift information on the position of the stylus tip, corresponding to the position of the stylus tip in the height directions while the stylus is moved in the correction target plane; and a correction-parameter setting process of simultaneously obtaining a correction parameter value optimal to correct the shift information on the position of the stylus tip, included in the calibration measurement data, for each of the sectors obtained by dividing a measurement range in the height directions.
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