发明名称 METHOD FOR MAKING A SURFACE ACOUSTIC WAVE DEVICE PACKAGE
摘要 A method for making a SAW device package includes the steps of: forming a pattern of a metal layer, that defines transmitting and receiving transducers of a SAW die, on a wafer; forming a pattern of a first photo sensitive layer, which defines a peripheral wall of a cap of the SAW die, on the metal layer and the wafer through lithography techniques; forming a pattern of a second photo sensitive layer, which defines a cover wall of the cap of the SAW die, on the first photo sensitive layer through lithography techniques; curing the first and second photo sensitive layers; dicing the wafer into SAW dies; and encapsulating the SAW dies with a molding compound.
申请公布号 US2007187360(A1) 申请公布日期 2007.08.16
申请号 US20070675751 申请日期 2007.02.16
申请人 DAINIPPON SCREEN MFG. CO., LTD. 发明人 SHEN CHI-YEN
分类号 C23F1/00;B44C1/22 主分类号 C23F1/00
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