PRODUCTION LINE SYSTEM AND CONVEYING METHOD FOR ARTICLE TO BE MACHINED IN PRODUCTION LINE SYSTEM

摘要

PROBLEM TO BE SOLVED: To solve a problem that the number of kinds of carriers and trays are increased according to the number of manufacturing steps, a production line system is made into a large scale and cost for establishing the system is increased since the conventional production line system is constituted such that the carrier and the tray mounted with an article to be machined are replaced according to the processing content in the respective steps. SOLUTION: The production line system for applying production machining processing to a semiconductor device 1 is provided with a plurality of pallets 2 mounted with the semiconductor device 1 and connectably constituted in a conveying direction; a conveying line 16 for conveying the semiconductor device 1 mounted on the pallet 2; a plurality of steps A/D for performing the production machining processing relative to the semiconductor device 1; and a pallet connection/separation part B/D arranged between the respective steps A/D of the conveying line 16 and performing connection or separation of the pallet 2. In the pallet connection/separation part B, the connection number of the pallets 2 is set according to the production machining processing content of the semiconductor device 1 in a subsequent step. COPYRIGHT: (C)2007,JPO&INPIT