WAFER HOLDER, SEMICONDUCTOR MANUFACTURING DEVICE MOUNTED WITH THE SAME AND WAFER PROBER

摘要

PROBLEM TO BE SOLVED: To provide a wafer holder equipped with a cooling module for quickly cooling a wafer, and configured to improve the soaking property of the wafer, and to be suitably used for a wafer prober or a cotar developer or the like. SOLUTION: This wafer holder is provided with a placing stand on whose placing surface a wafer is placed; a heating element 1 for heating the placing stand; and a cooling module for cooling the placing stand, wherein the outer diameter of the cooling module is set so as to be smaller than the outer diameter of the placing stand, and the heating element 1 is arranged outside the cooling module of the placing stand. A complementary heating element along with the outside heating element 1 may be arranged between the cooling module and the placing stand, or on the surface of the cooling module at the opposite side of the placing stand. COPYRIGHT: (C)2007,JPO&INPIT