| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem of frequency variance when using a plurality of piezoelectric elements, by using a flexure traveling wave generated by a single piezoelectric element and by generating a inclined rotary motion of the optical axis of a mirror. SOLUTION: In an optical scan element in which an inclinable mirror panel is oscillated by a piezoelectric body, there is provided a mirror panel equipped with an annular elastic frame in which at least on one surface, a piezoelectric body with electrodes having essentially divided into four equal areas symmetric with respect to the center is installed, connected to the frame in the central part of the four electrodes by torsion bars extending in the radial direction of the annular frame, and is positioned inside the frame. By using two axes, two dimensional scanning is made possible. COPYRIGHT: (C)2007,JPO&INPIT
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