MULTIFUNCTIONAL CANTILEVER, SCANNING PROBE MICROSCOPE, AND METHOD FOR CUTTING OBJECT TO BE PROCESSED

摘要

PROBLEM TO BE SOLVED: To observe a sample from above, reliably remove an object to be processed from a sample surface as observing it, and improve work efficiency by shortening the time required for the removal work. SOLUTION: A multifunctional cantilever is used to cut and remove an object to be processed X on the sample surface S1 and provided with a lever part 10 which is arranged in such a way that its lower surface 10a may be opposed to the sample surface and which is curved toward the side of its upper surface 10b when pressed to a sample S by a prescribed force; a blade part 11 which is formed in a blade shape in such a way that its bezel may be exposed to the side of the upper surface over a width direction on the tip side of the lever part and which comes into side contact with at least the sample surface when the lever part is curved; and a holder part for supporting the base side of the lever part in a cantilever state. The lever part is supported at the holder part in such a way the blade part may come into point contact with the sample surface until pressed. COPYRIGHT: (C)2007,JPO&INPIT