OPTICAL IMAGE ACQUISITION DEVICE, PATTERN INSPECTION DEVICE, OPTICAL IMAGE ACQUISITION METHOD, AND PATTERN INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To acquire a high contrast optical image of the pattern of a sample to be inspected. SOLUTION: The optical image acquisition device comprises a mounting section for mounting the sample to be inspected, a light radiating section for radiating light to the sample to be inspected mounted on the mounting section, a light quantity adjusting section for increasing and decreasing the light quantity of the radiated light radiated to the sample to be inspected, and an optical image receiving section for receiving the radiated light radiated to the sample to be inspected. The light quantity of the radiated light is increased and decreased with respect to a specific pattern of the sample to be inspected. COPYRIGHT: (C)2007,JPO&INPIT