| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor capable of simplifying the structure of a sensor system, and miniaturizing the system, concerning the structure of the pressure sensor. SOLUTION: A thin-walled part of a piezoelectric substrate is formed on the approximately center part on one main surface of the piezoelectric substrate, and a pair of comb-shaped electrodes sandwiching the thin-walled part is formed on a spot excluding the thin-walled part on the other main surface of the piezoelectric substrate. A surface wave propagating along the surface of the piezoelectric substrate is generated by using one comb-shaped electrode of the comb-shaped electrodes as the input side and the other comb-shaped electrode as the output side. The piezoelectric substrate is deformed by a pressure change applied to the thin-walled part, and thereby a pressure change amount is detected by a frequency propagation intensity change between the input and the output of the pair of the comb-shaped electrodes sandwiching the thin-walled part on the piezoelectric substrate, to thereby detect inexpensively and accurately with a simple structure. COPYRIGHT: (C)2007,JPO&INPIT
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