| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser device for reducing any adverse influence on laser performance due to an acoustic wave to be generated from the main discharge of a laser device which performs pulse oscillation by high repetition with 2 KHz or more. SOLUTION: Between one site and the other site forming a clearance or a stepped section on the inside face of a laser chamber, the site which is far from a discharge space caves in more than the site which is near to the discharge space. At least the site which is far from the discharge space from among sites forming the clearance on the inside face of the laser chamber is formed of sound absorbing materials. Sound absorbing materials are formed in such configurations that a boundary section between a plane region and a curved surface region mutually continuing on the internal face of the laser chamber is covered. Also, the mounting part of components installed on the inside face of the laser chamber is housed in a recess formed on the inside face of the laser chamber, and the opening of the recess is closed with cover members. Moreover, a guide member for guiding an acoustic wave from the discharge space is formed in such configurations that a clearance between the discharge space and a preliminarily ionization electrode which is parallel to the main electrode is covered. COPYRIGHT: (C)2007,JPO&INPIT |
