发明名称 |
Scanning electron microscope and apparatus for detecting defect |
摘要 |
A scanning electron microscope, by which an image of unevennesses on the surface of a sample may be obtained in a high-resolution manner and a high contrast one, is provided according to the present invention. A sample image is obtained by use of the scanning electron microscope with a configuration in which a positive voltage is applied in order to accelerate a primary electron beam, and an electric field shielding plate, a magnetic field shielding plate, or an electromagnetic field shielding plate is arranged on the upper side of an object lens.
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申请公布号 |
US2007187598(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
US20070655264 |
申请日期 |
2007.01.19 |
申请人 |
TACHIBANA ICHIRO;SATO MITSUGU;FUKADA ATSUKO;SUZUKI NAOMASA;FUKUDA MUNEYUKI |
发明人 |
TACHIBANA ICHIRO;SATO MITSUGU;FUKADA ATSUKO;SUZUKI NAOMASA;FUKUDA MUNEYUKI |
分类号 |
G21K7/00;H01J37/141;H01J37/244;H01J37/28 |
主分类号 |
G21K7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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