发明名称 |
X-Y stage driver having locking device and data storage system having the X-Y stage driver |
摘要 |
An X-Y stage driver having a locking device and a data storage system having the X-Y stage driver. The X-Y stage driver includes an X-Y stage; a supporting unit that supports the X-Y stage and has elastic beams that support corners of the X-Y stage; a driving unit that drives the X-Y stage in a first direction and a second direction which is perpendicular to the first direction; a stiffener that prevents the X-Y stage from rotating; and a locking device that fixes the stiffener by an electrostatic force.
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申请公布号 |
US2007188199(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
US20060582336 |
申请日期 |
2006.10.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK HONG-SIK;SHIM JONG-YOUP;HONG SEUNG-BUM;MIN DONG-KI |
分类号 |
H03B1/00;G02B21/00 |
主分类号 |
H03B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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