| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a portable type atmospheric pressure plasm generating device capable of obtaining a desired gas exciting state by suppressing a gas flow to stably maintain atmospheric pressure plasma, and by its emission analysis. <P>SOLUTION: This portable type atmospheric pressure plasma generating device is composed of a grounding electrode 4 disposed movably in the axial direction of an external insulating tube 8 as well as an auxiliary electrode 4a fixed to its tip, an internal insulating tube 9 disposed at the axial center of the external insulating tube 8, a power electrode 3 disposed in its inside, a Laval nozzle 1 for introducing a gas which is disposed at the rear end of the external insulating tube 8, a plasma gas outlet at the tip of the external insulating tube 8. The plasma generating gas supplied from a gas supply part A-4 is introduced into the external insulating tube 8 from the Laval nozzle 1, high frequency power for discharge is supplied between the grounding electrode 4 as well as the auxiliary electrode 4a and the power electrode 3 from a programmable high frequency power supply part A-1, and a pulse bias voltage is impressed between the power electrode 3 and an object 7 to be treated by a pulse bias power supply A-2 to generate plasma. <P>COPYRIGHT: (C)2007,JPO&INPIT |
