发明名称 ALKALI DEVELOPABLE PHOTOSENSITIVE RESIN COMPOSITION
摘要 <P>PROBLEM TO BE SOLVED: To provide an alkali developable resin composition and an alkali developable photosensitive resin composition having excellent sensitivity, resolution and developability and capable of accurately forming a fine pattern. <P>SOLUTION: The alkali developable resin composition uses a photopolymerizable unsaturated compound having a structure formed by adding an epoxy compound (D) and further esterifying a polybasic acid anhydride (E), to a reaction product prepared by esterifying a polybasic acid anhydride (C) to an epoxy additive having a structure formed by adding an unsaturated monobasic acid (B) to an epoxy compound (A) represented by formula (I). <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007206351(A) 申请公布日期 2007.08.16
申请号 JP20060024815 申请日期 2006.02.01
申请人 ADEKA CORP 发明人 SATO NAOMI;MAKABE YOSHIE;FUJIGAMI WAKIFUMI
分类号 G03F7/027;C08F290/00;C08G59/14 主分类号 G03F7/027
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