| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a container processing apparatus using plasma, which forms a coating of microwave plasma CVD on the surface of a three-dimensional hollow container, such as a plastic bottle or paper container. <P>SOLUTION: The container processing apparatus using plasma has at least one metal hollow housing (2) for plasma processing, in the conductive surface of a waveguide tube (1) used for supplying microwaves. The side faces are electrically joined. A slit (3) defined in each joint face allows an electromagnetic field energy connection between the metal hollow housing (2) and the wave guide tube (1). A process gas introducing tube (4) made of a conductive material is electrically connected to the metal hollow housing (2) on the axis of the cylindrical hollow defined in the housing (2). The length of the gas introduction tube (4) based on an electric connection point as a reference satisfies the following condition: 1/2λ×n+α, wherein λ is the wavelength of a microwave, n is an integer equal to or greater than 1, and α is 0<α≤15 mm. <P>COPYRIGHT: (C)2007,JPO&INPIT |
