发明名称 |
Minimizing low-k dielectric damage during plasma processing |
摘要 |
Embodiments of the invention provide a semiconductor device having dielectric material and its method of manufacture. A method comprises a short (<=2 sec) flash activation of an ILD surface followed by flowing a precursor such as silane, DEMS, over the activated ILD surface. The precursor reacts with the activated ILD surface thereby selectively protecting the ILD surface. The protected ILD surface is resistant to plasma processing damage. The protected ILD surface eliminates the requirement of using a hard mask to protect a dielectric from plasma damage.
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申请公布号 |
US2007190804(A1) |
申请公布日期 |
2007.08.16 |
申请号 |
US20060352047 |
申请日期 |
2006.02.10 |
申请人 |
BECK MICHAEL;FITZSIMMONS JOHN A;HORNIK KARL;RESTAINO DARRYL |
发明人 |
BECK MICHAEL;FITZSIMMONS JOHN A.;HORNIK KARL;RESTAINO DARRYL |
分类号 |
H01L21/31 |
主分类号 |
H01L21/31 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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