| 摘要 |
A wafer mapping calibration unit and a wafer mapping calibration method using the same are provided to perform exactly a wafer calibration process in spite of an abnormal loading state of a wafer by using a wafer detecting portion. A wafer mapping calibration unit includes an upper panel, a fixing member, a lower panel and a wafer detecting portion. The upper panel(121) is loaded on a wafer mapping unit. The fixing member is installed at the upper panel in order to connect the wafer mapping unit with the upper panel. The lower panel(122) contacts a lateral portion of the wafer mapping unit. The thickness of the lower panel is smaller than the interval between wafers loaded in a wafer loading unit. The wafer detecting portion(130) is formed on the lower panel.
|
