| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a double-faced adhesive tape for fixing a polishing pad, which is excellent in slurry resistance, and can firmly fix even a polishing pad having large surface asperities to a polishing surface plate. <P>SOLUTION: The double-faced adhesive tape 1 for fixing the polishing pad, has a first adhesive layer 3 arranged on one surface of a substrate 2, for being fixed to the polishing pad, and a second adhesive layer 4 formed on the other surface of the substrate 2, for being fixed to the surface plate, and functions to fix the polishing pad to the surface plate of a polishing device. Herein, the first adhesive layer 3 is formed of a synthetic rubber-based hot-melt adhesive, and the second adhesive layer 4 is formed of a pressure-sensitive adhesive. <P>COPYRIGHT: (C)2007,JPO&INPIT |
