| 摘要 |
PROBLEM TO BE SOLVED: To prevent breaking of a relative positional relation with a discharge container by movements of an inside electrode in an inside tube even if the inside electrode repeats extension and contraction due to repetition of turning on or off of an excimer lamp. SOLUTION: In an excimer lamp consisting of an electric discharge container in which an inside tube and an outside tube are arranged coaxially, an outside electrode installed on an external surface of the outside tube, an internal electrode installed on the internal surface of the inside tube, and an elastic body which pushes the inside electrode to the inside tube and fixes it, an inclusion has been installed which is a part of the inside tube in the axial direction between the inside electrode and the elastic body or between inside electrode and the inside tube. COPYRIGHT: (C)2007,JPO&INPIT
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