| 摘要 |
PROBLEM TO BE SOLVED: To provide a tiled periodic metal film sensor constituted to compensate an influence of an external environment such as a change of an ambient temperature. SOLUTION: Tiled periodic metal film sensor cells 335, 435 are provided with tiles comprising the first sets 310, 410 and the second sets 320, 420, arranged alternately like a checkerboard. The first sets 310, 410 and the second sets 320, 420 are constituted of the first and second metal films deposited on a dielectric substrate 399. The first metal film is pattern-formed in the first period 325, and the second metal film is pattern-formed in the second period 355 different from the first period 325. COPYRIGHT: (C)2007,JPO&INPIT
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