| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection device, which photographs fluorescent X-ray images of an object to be measured being on various positions, by moving an X-ray detector or a stage, while preventing the object to be measured and an X-ray measurement optics from being damaged. SOLUTION: The X-ray inspecting device 1 comprises: the stage 14 for arranging the object to be measured between the X-ray detector 12 and an X-ray source 11; a stage driving mechanism; an optical camera 16 for photographing a visible light image; a collision hazardous region setting part 32 for setting a collision hazardous region, having a potential of collision between the object to be measured and the X-ray measurement optics 13, based on the visible light image photographed, while rotating/moving the stage 14; a collision-determining means 33 for determining whether a portion of the X-ray measurement optics 13 is in the collision hazardous area; and a moving speed control means 52, which changes the moving speed into a prescribed value slower than the moving speed, in a state where the whole X-ray measurement optics 13 is not inside the collision hazardous region, when a determination is made such that the portion of the X-ray measurement optics 13 is located inside the collision hazardous region. COPYRIGHT: (C)2007,JPO&INPIT
|
