| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the exchanging method and program of a processing apparatus for exchanging a processing apparatus to be provided for processing while continuing the processing of a processing unit having a processing apparatus other than the object of exchange. <P>SOLUTION: This method for exchanging a processing cup in a processor for carrying an object to be processed in a processing unit by a conveyance means, and for operating processing to the object be processed in such a status that it can be surrounded by the processing cup as the processing apparatus includes a step S104 for confirming that the processing of the object to be processed has ended by the object processing unit as the object of cup exchange, a step S105 for notifying an operator that a processing apparatus exchanging operation becomes startable and a step S107 for releasing the operation inhibiting status of the conveying means which rushes according as the shutter of the object processing unit as the object of cup exchange is closed for performing the cup exchanging operation, and for validating a carriage-in and out operation to another processing unit which is not the object of exchange. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
