| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus that can perform laser beam machining with a distance kept constant between an optical system and a workpiece surface, without installing a measuring instrument for the height of the workpiece surface, a complicated control circuit and a highly accurate driving mechanism. <P>SOLUTION: With a stage 5 holding a workpiece 50, a laser light source 15 emits a laser beam for machining, wherein an optical system 20 is arranged in a position oppositely facing the workpiece held on the stage 5. By this optical system, the laser beam emitted from the laser light source is made incident on the surface of the workpiece held on the stage. A supporting mechanism 10 supports the optical system movably in the direction in which a distance varies between the workpiece held on the stage and the optical system. An air bearing 25 is provided so that a relative position to the optical system is fixed. The air bearing is placed opposite to the workpiece held on the stage, a gap is secured between the air bearing and the surface of the workpiece by spraying a liquid thereto. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
