| 摘要 |
PROBLEM TO BE SOLVED: To provide a displacement sensor having high sensitivity by making assembling easy. SOLUTION: The displacement sensor is provided with: an optical fiber 3 for emitting introduced detection light from a first end face 3b; a first condensing element 4 for irradiating the first end face with reflection light by irradiating an object face 5 with light emitted from the first end face; detection signal output means 6-8 for outputting a signal indicating displacement of the object face on the basis of the reflection light incident on the optical fiber from the first end face; an emitting part 1 for emitting the detection light; and a second condensing element 2 for introducing the detection light by irradiating a second end face 3a of the optical fiber with light from the emitting part. COPYRIGHT: (C)2007,JPO&INPIT
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