| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitive pressure sensor capable of performing pressure detection without affecting the inside pressure of a cavity in a manufacturing process, without being damaged, and moreover with high sensitivity. SOLUTION: In a glass substrate 11, a first and a second conductive member 12, 13 are buried. On the principal plane 11b of the glass substrate 11, extracting electrodes 14a, 14b are formed in order to perform electrical connection with the first and second members 12, 13 respectively. On the first member 12 being exposed on the principal plane 11a side of the glass substrate 11, a fixed electrode 15 is formed. Onto the principal plane 11a of the glass substrate 11, a silicon substrate 18 having a pressure-sensitive diaphragm 18a being a movable electrode of the pressure sensor is eutectically bonded through a bonding member 17. Outside the fixed electrode 15, an annular spacer 16 is formed, and the spacer 16 has beams 16a extending to a junction region. COPYRIGHT: (C)2007,JPO&INPIT
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