| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional coordinate measuring technique capable of determining accurately the three-dimensional coordinate of an object point. SOLUTION: This three-dimensional coordinate measuring device is equipped with: external imaging optical system modules 203, 204 for imaging light reflected by the object point M; fine domain wave surface extraction optical system modules 217, 218 for picking up a fine domain wave surface on the imaging surfaces 207, 208; a wave surface superimposition module 222 for superimposing picked-up light; a superimposed wave surface light-receiving module 223 for receiving superimposed light; an optical path length changing module 221 for changing the optical path length between the fine domain wave surface extraction optical system module 217 and the wave surface superimposition module 222; and an object point coordinate calculation module 227 for calculating the three-dimensional coordinate of the object point M from position coordinates of the fine domain wave surface extraction optical system modules 217, 218 judged such that interference is generated by a change of light intensity caused by a change of the optical path length. COPYRIGHT: (C)2007,JPO&INPIT
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