| 摘要 |
PROBLEM TO BE SOLVED: To provide a dry vacuum pump capable of dispensing with a filter in a pump suction port. SOLUTION: The dry vacuum pump 100 is provided with an intake part 30 connected to a suction port 10a sucking gas. The intake part 30 is provided with a hollow cylindrical outer wall 34a and an inner cylinder 38, and is provided with a deposition space 31b formed between an outer peripheral surface of the outer wall 34a and an outer peripheral surface 38o of the inner cylinder 38 in a suction chamber 31 in a case 34. A powder-like solid carried together with the gas is deposited in the deposition space 31b. COPYRIGHT: (C)2007,JPO&INPIT
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