| 摘要 |
The position of a movable stage is detected without increasing cost or the size of apparatus. An apparatus comprises movable stages (WST, MST) that move along a plane of motion ( 12 a); and a position-detection apparatus that detects the positions of the movable stages (WST, MST) with beams (B 1 to B 3 ). The apparatus further comprises driving apparatuses ( 82, 84 ) that drives the movable stages (WST, MST); follow-up optical members ( 30 to 33 ) which are provided on the driving apparatuses ( 81, 84 ) and cause the beams (B 1 to B 3 ) to follow the movable stages (WST, MST) as the movable stages (WST, MST) move; and first optical members ( 34 to 39 ) which are provided on the movable stages (WST, MST) and are optically coupled with the follow-up optical members ( 30 to 33 ).
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