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发明名称
摘要
申请公布号
JP3958857(B2)
申请公布日期
2007.08.15
申请号
JP19980063724
申请日期
1998.03.13
申请人
发明人
分类号
H01L35/34;B22F3/24;C22C1/04;H01L35/16;H01L35/32
主分类号
H01L35/34
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代理人
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