发明名称 METHOD OF FABRICATING SUBSTRATES, IN PARTICULAR FOR OPTICS, ELECTRONICS OR OPTOELECTRONICS----------------------------------------
摘要 The invention relates to a method for fabricating substrates (30), in particular for optics, electronics, or optoelectronics, by transferring a layer (170) of a material suitable for said type of application, and in particular a semiconductor material, onto a support (20). Said method is characterized in that it comprises the following steps : a) forming a flat face (13) termed the "front face" on a raw ingot (10) of material intended to form said layer (170); b) implanting atomic species beneath said front face (13) to a controlled mean implantation depth to create a zone of weakness (16) defining a top layer (17) of said ingot (10 ); c) bonding a support (20) onto said front face (13); d) directly detaching from the ingot (10), at the zone of weakness (16), the portion (170) of said top layer (17) which is bonded to said support (20); and e) re-commencing said cycle of operations from step b) at least once. Said method saves starting material.
申请公布号 EP1537258(B1) 申请公布日期 2007.08.15
申请号 EP20030763891 申请日期 2003.07.16
申请人 S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES 发明人 GHYSELEN, BRUNO;LETERTRE, FABRICE
分类号 C30B33/00;H01L21/304;H01L21/00;H01L21/02;H01L27/12 主分类号 C30B33/00
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