,申请号JP19970529598-传众专利搜索

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发明名称
摘要
申请公布号	JP3957319(B2)	申请公布日期	2007.08.15
申请号	JP19970529598	申请日期	1997.02.14
申请人		发明人
分类号	H01L21/3065;C04B41/53;H01L21/3213	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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