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发明名称
ELEKTROSTATISCHE BOND-EINSPANNVORRICHTUNG MIT INTEGRIERTER HOCHFREQUENZELEKTRODE UND THERMOSTATISCHEN MITTELN
摘要
申请公布号
AT369625(T)
申请公布日期
2007.08.15
申请号
AT20040708363T
申请日期
2004.02.05
申请人
SEMCO ENGINEERING S.A.
发明人
PELLEGRIN, YVON
分类号
H01L21/68;H02N13/00
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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