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经营范围
发明名称
Improved wafer boat support and method for twin tower wafer boat loader
摘要
申请公布号
EP1139392(B1)
申请公布日期
2007.08.15
申请号
EP20010107075
申请日期
2001.03.21
申请人
AMTECH SYSTEMS, INC.
发明人
MARTIN, JOHN M.;HARRISON, ARTHUR W.;EDWARDS, ALLEN D.
分类号
H01L21/68;H01L21/673;H01L21/677
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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